Destruction forêt la trappe closed field unbalanced magnetron sputtering Conscience Généraliser Banzai
Applied Sciences | Free Full-Text | Review of GaN Thin Film and Nanorod Growth Using Magnetron Sputter Epitaxy | HTML
MoSx Coatings by Closed-Field Magnetron Sputtering | SpringerLink
Influence of magnetic field configuration on plasma characteristics and thin film properties in dual magnetron reactive high power impulse magnetron sputtering discharge with Al in Ar/O2 mixture - ScienceDirect